Recent advances in ion-assisted growth of Cr/Sc multilayer X-ray mirrors for the water window

Vacuum

Volumn 68, Issue 3, 2002, Pages 275-282

  Birch, Jens ^a   Eriksson, Fredrik ^a   Johansson, Göran A ^b   Hertz, Hans M ^b  

^a LINKÖPING UNIVERSITY   (Sweden)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Chromium; Ion assisted growth; Multilayer; Scandium; Sputtering; Water window; X ray mirror

Indexed keywords

CHROMIUM; ION BEAM ASSISTED DEPOSITION; NANOSTRUCTURED MATERIALS; SCANDIUM; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

X-RAY MIRRORS;

MULTILAYERS;

EID: 0037145884     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00457-8     Document Type: Conference Paper

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