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Volumn 35, Issue 31, 1996, Pages 6126-6130

Micromirrors and microlenses fabricated on polymer materials by means of infrared radiation

Author keywords

Infrared; Micro optics; Microlenses; Micromirrors

Indexed keywords


EID: 0011648705     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.006126     Document Type: Article
Times cited : (21)

References (13)
  • 1
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    • M. Edward Motamadi and L. Beiser, eds. Micro-optics/Micro-mechanics and Laser Scanning and Shaping, Proc. SPIE 2383 (1995). The whole volume is dedicated to micro-optics. Opt. Eng. 33 (11) (1994) has a section dedicated to micro-optics.
    • (1995) Micro-Optics/Micro-Mechanics and Laser Scanning and Shaping , pp. 2383
    • Edward Motamadi, M.1    Beiser, L.2
  • 2
    • 84975664464 scopus 로고
    • Technique for monolithic fabrication of microlens arrays
    • Z. D. Popovic, R. A. Sprague, and G. A. Neville Cornelli, “Technique for monolithic fabrication of microlens arrays,” Appl. Opt. 27, 1281-1284 (1988).
    • (1988) Appl. Opt. , vol.27 , pp. 1281-1284
    • Popovic, Z.D.1    Sprague, R.A.2    Neville Cornelli, G.A.3
  • 3
    • 0000610014 scopus 로고
    • Microlens fabricated by melting a photoresist on a base layer
    • S. Haselbeck, H. Schreiber, J. Schwider, and N. Streibl, “Microlens fabricated by melting a photoresist on a base layer,” Opt. Eng. 32, 1322-1324 (1993).
    • (1993) Opt. Eng. , vol.32 , pp. 1322-1324
    • Haselbeck, S.1    Schreiber, H.2    Schwider, J.3    Streibl, N.4
  • 4
    • 0001471275 scopus 로고
    • Preshaping photoresist for refractive microlens fabrication
    • T. R. Jay and M. B. Stern, “Preshaping photoresist for refractive microlens fabrication,” Opt. Eng. 33, 3552-3555 (1994).
    • (1994) Opt. Eng. , vol.33 , pp. 3552-3555
    • Jay, T.R.1    Stern, M.B.2
  • 6
    • 84975597862 scopus 로고
    • Microlens arrays produced by a photolytic technique
    • N. F. Borrelli and D. L. Morse, “Microlens arrays produced by a photolytic technique,” Appl. Opt. 27, 476-479 (1988).
    • (1988) Appl. Opt. , vol.27 , pp. 476-479
    • Borrelli, N.F.1    Morse, D.L.2
  • 7
    • 0027702636 scopus 로고
    • Mirrors on a chip
    • J. M. Younse, “Mirrors on a chip,” IEEE Spectrum 30, 27-31 (Nov. 1993).
    • (1993) IEEE Spectrum , vol.30 , pp. 27-31
    • Younse, J.M.1
  • 9
    • 0038990632 scopus 로고
    • Micromirror arrays using KOH:H2O micromachining of sili- con for lenses templates, geodesic lenses, and other applications
    • 2O micromachining of sili- con for lenses templates, geodesic lenses, and other applications,” Opt. Eng. 33, 3578-3588 (1994).
    • (1994) Opt. Eng. , vol.33 , pp. 3578-3588
    • Kendall, D.L.1    Eaton, W.P.2    Manginell, R.3    Dogges, T.G.4
  • 10
    • 7444230502 scopus 로고
    • Infrared recording and reconstruction of diffractive elements on thin polymer films
    • R. A. Lessard, ed., Proc. SPIE 1213
    • S. Calixto, “Infrared recording and reconstruction of diffractive elements on thin polymer films,” in Photopolymer Device Physics, Chemistry, and Applications, R. A. Lessard, ed., Proc. SPIE 1213, 32-38 (1990).
    • (1990) Photopolymer Device Physics, Chemistry, and Applications , pp. 32-38
    • Calixto, S.1
  • 11
    • 0019086512 scopus 로고
    • Measured spatial properties of the cw Nd:YAG laser beam
    • M. S. Scholl, “Measured spatial properties of the cw Nd:YAG laser beam,” Appl. Opt. 19, 3655-3659 (1980).
    • (1980) Appl. Opt. , vol.19 , pp. 3655-3659
    • Scholl, M.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.