Fabrication of microstructures by ion beam micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 248-255

  Davies, Sam T ^a   Hayton, D A ^a   Tsuchiya, Kazuyoshi ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FABRICATION; FOCUSING; ION BEAMS; MASKS; MICROELECTRONICS; MICROSTRUCTURE; NICKEL; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICES;

FOCUSED ION BEAMS; KAUFMAN-TYPE SOURCES; MICROELECTROMECHANICAL SYSTEMS;

MICROMACHINING;

EID: 0030382059     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250957     Document Type: Conference Paper

References (7)