Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3010, Issue , 1997, Pages 105-110

  Long, Pin ^a   Daschner, Walter ^a   Johnson, Eric ^a   Lee, Sing H ^a  

^a USA

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; EFFICIENCY; ETCHING; FABRICATION; MASKS; PHOTOLITHOGRAPHY; POLYMERS; SPURIOUS SIGNAL NOISE;

DIFRACTIVE OPTICAL ELEMENTS; DUPONT PHOTOPOLYMERS; GRAY SCALE MASKS;

OPTICAL DEVICES;

EID: 0031353263     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)