Effect of metal-insulator-semiconductor structure derived space charge field on the tip vibration signal in electrostatic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 2688-2691

  Hong, Seungbum ^a,c   Woo, Jungwon ^b   Shin, Hyunjung ^a   Kim, Eunah ^b   Kim, Keun Ho ^a   Jeon, Jong Up ^a   Pak, Y Eugene ^a   No, Kwangsoo ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; ELECTRIC SPACE CHARGE; METALLIC FILMS; SEMICONDUCTING BORON; SEMICONDUCTING SILICON; SUBSTRATES;

BIASING FIELD; TIP VIBRATION SIGNALS;

ATOMIC FORCE MICROSCOPY;

EID: 0034316072     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1323968     Document Type: Article

References (7)

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