Quantitative x-ray photoelectron spectroscopy study of Al/AlO x bilayers

Journal of Applied Physics

Volumn 91, Issue 12, 2002, Pages 10163-10168

  Batlle, Xavier ^a   Hattink, Bart Jan ^a   Labarta, Amílcar ^a   Åkerman, Johan J ^b   Escudero, Roberto ^b   Schuller, Ivan K ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; INSULATING BARRIERS; NATURAL OXIDATION; OXIDATION STATE; SURFACE OXIDE LAYER; X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES; XPS SPECTRA;

METALLIC COMPOUNDS; OXIDATION; PHOTOELECTRONS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037098001     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1478791     Document Type: Article

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