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Volumn 506, Issue 1-2, 2002, Pages 66-79

Real time STM observation of Au-assisted decomposition of SiO2 films on Si(1 1 1) at elevated temperatures

(4) Jun, Wang a Mitchell, C E J a Egdell, R G a Foord, J S a

Author keywords

Gold; Oxidation; Scanning tunneling microscopy; Silicon oxides; Surface diffusion; Surface structure, morphology, roughness, and topography

Indexed keywords

DIFFUSION; GOLD; HIGH TEMPERATURE EFFECTS; INTERFACES (MATERIALS); MORPHOLOGY; NANOSTRUCTURED MATERIALS; NUCLEATION; OXIDATION; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SILICA; SURFACE ROUGHNESS;

FILM DECOMPOSITION;

ULTRATHIN FILMS;

EID: 0037052779 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(01)01911-2 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.