The structure and thermal behavior of Cu on ultrathin films of SiO2 on Si(111)

Surface Science

Volumn 372, Issue 1-3, 1997, Pages 21-27

  Zhou, J B ^a   Gustafsson, T ^a   Garfunkel, E ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Copper; Medium energy ion scattering (MEIS); Nickel; Silicon; Silicon oxides

Indexed keywords

ANNEALING; COATINGS; CRYSTAL LATTICES; DIFFUSION; GROWTH (MATERIALS); NICKEL; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; SURFACE STRUCTURE; THERMODYNAMIC PROPERTIES; ULTRATHIN FILMS;

MEDIUM ENERGY ION SCATTERING; OVERLAYER;

COPPER;

EID: 0031075841     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(96)01100-4     Document Type: Article

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