Real-time ellipsometry studies of gold thin-film growth

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 6 A, 1997, Pages 3662-3668

  Lee, Soonil ^a   Hong, Junegie ^a   Soo ghee, O H ^a  

^a Ajou University   (South Korea)

Author keywords

Effective medium approximations; Growth models; In situ ellipsometry

Indexed keywords

EFFECTIVE MEDIUM APPROXIMATIONS; ELLIPSOMETRIC CONSTANTS; GROWTH MODELS; REAL TIME ELLIPSOMETRY;

CALCULATIONS; COMPUTER SIMULATION; ELLIPSOMETRY; GOLD; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; NUCLEATION; OPTICAL PROPERTIES; PERMITTIVITY; REAL TIME SYSTEMS; SURFACE ROUGHNESS; THIN FILMS;

FILM GROWTH;

EID: 0031167531     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3662     Document Type: Article

References (16)

1. R. H. Doremus: J. Appl. Phys 37 (1966) 2775.
2. Marie-Luce Théye: Phys. Rev. B 2 (1970) 3060.
3. C. G. Granqvist and O. Hunderi: Phys. Rev. B 16 (1977) 3513.
4. D. E. Aspnes, E. Kinsbron and D. D. Bacon: Phys. Rev. B 21 (1980) 3290.
5. F. Parmigiani, G. Samoggia and G. P. Ferraris: J. Appl. Phys 57 (1985) 2524.
6. E. Elizalde, P. Gadenne and M. L. Théye: Opt. Commun. 60 (1986) 378.
7. Y. Yagil, P. Gadenne, C. Julien and G. Deutscher: Phys. Rev. B 46 (1992) 2503.
8. G. A. Niklasson and C. G. Granqvist: J. Appl. Phys. 55 (1984) 3382.
9. K. D. Cummings, J. C. Garland and D. B. Tanner: Phys. Rev. B 30 (1984) 4170.
10. D. E. Aspnes: Phys. Rev. B 33 (1986) 677.
11. R. M. A. Azzam and N. M. Bashara: Ellipsometry and Polarized Light (North-Holland, New York, 1977) 1st ed., Chap. 4.
12. D. E. Aspnes: Handbook of Optical Constants of Solids, ed. E. D. Palik (Academic Press, Orlando, 1985) 1st ed., Chap. 5.
13. D. E. Aspnes and J. B. Theenten: Phys. Rev. B 20 (1979) 3292.
14. K. B. Park, Y. H. Shin, K. K. Koo, S. Lee, S. Y. Kim and S. G. Oh: J. Kor. Vac. Soc. 3 (1994) 166.
15. D. E. Aspnes: J. Opt. Soc. Am. 64 (1974) 812.
16. J. E. Greene: Handbook of Deposition Technologies for Films and Coatings, ed. R. F. Bunshah (Noyes Publications, Park Ridge, 1994) 2nd ed., Chap 13.