Spectroscopic analysis of trap assisted tunneling in thin oxides by means of substrate hot electron injection experiments

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 159-162

  Driussi, F ^a   Iob, R ^a   Esseni, D ^a   Selmi, L ^a   Van Schaijk, R ^b   Widdershoven, F ^b  

^a UNIVERSITY OF UDINE   (Italy)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELASTICITY; ELECTRON TRAPS; ELECTRON TUNNELING; OXIDES; SPECTROSCOPIC ANALYSIS; STRESS ANALYSIS; SUBSTRATES;

HOT ELECTRON (HE) STRESS;

THIN FILMS;

EID: 0036928971     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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