Characterization of silicon microstructures by feedback interferometry

Journal of Optics A: Pure and Applied Optics

Volumn 4, Issue 6, 2002, Pages

  Annovazzi Lodi, V ^a   Merlo, S ^a   Norgia, M ^a  

^a UNIVERSITY OF PAVIA   (Italy)

Author keywords

Microelectromechanical systems (MEMS); Micromachining; Microsensors; Optical interferometry

Indexed keywords

ASPECT RATIO; CHARACTERIZATION; ELECTRIC VARIABLES MEASUREMENT; GYROSCOPES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; MICROSTRUCTURE; RESONATORS; SEMICONDUCTING SILICON;

FEEDBACK INTERFEROMETRY; OPTICAL INTERFEROMETRY;

INTERFEROMETRY;

EID: 0036864499     PISSN: 14644258     EISSN: None     Source Type: Journal    
DOI: 10.1088/1464-4258/4/6/374     Document Type: Article

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