Measurements on a micromachined silicon gyroscope by feedback interferometry

IEEE/ASME Transactions on Mechatronics

Volumn 6, Issue 1, 2001, Pages 1-6

  Annovazzi Lodi, V ^a,b   Merlo, S ^a,b   Norgia, M ^a,b  

^a IEEE   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

Gyroscopes; Microsensors; Optical interferometry

Indexed keywords

FEEDBACK INTERFEROMETRY; MASS DISPLACEMENT; SILICON VIBRATING GYROSCOPE;

ELECTRIC VARIABLES MEASUREMENT; HYSTERESIS; INSPECTION; INTERFEROMETRY; MICROMACHINING; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON; SEMICONDUCTOR LASERS;

GYROSCOPES;

EID: 0035272237     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.914385     Document Type: Article

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