Mechanical-thermal noise in micromachined gyros

Microelectronics Journal

Volumn 30, Issue 12, 1999, Pages 1227-1230

  Annovazzi Lodi, V ^a   Merlo, S ^a  

^a UNIVERSITY OF PAVIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; RESONANCE; SENSITIVITY ANALYSIS; SPURIOUS SIGNAL NOISE; VIBRATIONS (MECHANICAL);

CORIOLIS FORCE; MECHANICAL-THERMAL NOISE; VIBRATING-MASS SURFACE-MACHINED GYROSCOPES;

GYROSCOPES;

EID: 0033317749     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(99)00046-4     Document Type: Article

References (6)

1. R. Voss, Silicon micromachined vibrating gyroscopes, in: Proceedings of the Micromachined Devices and Components III, SPIE Vol. 3224, pp. 62-73.
2. H. Sorg (Ed.), Proceedings of Symposium Gyro Technology 1997, Stuttgart, Germany, 16-17 September 1997.
3. Park K.Y., Lee C.W., Oh Y.S., Cho Y.H. Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs. Sensors and Actuators A. A-64:1998;69-76.
4. M.S. Kranz, G.K. Fedder, Micromechanical vibratory rate gyroscopes fabricated in conventional CMOS, Proceedings of Symposium Gyro Technology 1997, Stuttgart, Germany, 16-17 September 1997, paper 3.
5. Gabrielson T.B. Mechanical-thermal noise in micromachined acoustic and vibration sensors. IEEE Transactions on Electron Devices. 40:(5):1993;903-909.
6. S. Donati, V. Annovazzi-Lodi, M. Musio, G. Alessandretti, A fiberoptic gyroscope for automotive navigation, in: Proceedings of the International Conference on Advanced Microsystems for Automotive Applications, Berlin, Germany, 2-3 December 1996.