Relation between hole traps and hydrogenous species in silicon dioxides

Solid-State Electronics

Volumn 46, Issue 11, 2002, Pages 1839-1847

  Zhang, J F ^a   Zhao, C Z ^a   Sii, H K ^a   Groeseneken, G ^b   Degraeve, R ^b   Ellis, J N ^c   Beech, C D ^c  

^a LIVERPOOL JOHN MOORES UNIVERSITY   (United Kingdom)

^b IMEC   (Belgium)

^c Zarlink Semiconductor   (United Kingdom)

Author keywords

CMOS; Hole traps; Hydrogenous species; Reliabilities; Silicon dioxides

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CHARGE; HOLE TRAPS; MOS DEVICES; SILICA;

POSITIVE CHARGE;

GATES (TRANSISTOR);

EID: 0036839490     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(02)00157-0     Document Type: Conference Paper

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