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Volumn 149, Issue 8, 2002, Pages

Electrostatic actuators with intrinsic stress gradient I. materials and structures

(8) Chinthakindi, Anil K a Bhusari, Dhananjay a Dusch, Brian P a Musolf, Jürgen b Willemsen, Balam A b Prophet, Eric b Roberson, Mark c Kohl, Paul A a

a Georgia Institute of Technology (United States)

b SUPERCONDUCTOR TECHNOLOGIES INC (United States)

c MCNC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; ELECTROPLATING; GOLD; LITHOGRAPHY; MATHEMATICAL MODELS; METALLIC FILMS; MONOLAYERS; RESIDUAL STRESSES; STICTION; THERMAL EXPANSION; THERMODYNAMIC STABILITY;

ELECTROSTATIC ACTUATOR; INTRINSIC STRESS GRADIENT; SELF-ASSEMBLED MONOLAYER; STRESS-INDUCED BENDING MOMENT; THIOL;

MICROELECTROMECHANICAL DEVICES;

EID: 0036686668 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1486454 Document Type: Article

Times cited : (21)

References (20)

1
- 0029694266
- (1996) IEEE MTT-S Int. Microwave Symp. , vol.2 , pp. 1141
- Goldsmith, C.¹ Randall, J.² Eshelman, S.³ Lin, T.H.⁴ Denniston, D.⁵ Chen, S.⁶ Norvell, B.⁷

2
- 0026941398
- (1992) Sens. Actuators A , vol.35 , pp. 51
- Zook, J.D.¹ Burns, D.W.² Guckel, H.³ Sniegowski, J.J.⁴ Engelstad, R.L.⁵ Feng, Z.⁶

3
- 0029459298
- (1995) Proceedings of the IEEE Ultrasonics Symposium , pp. 489
- Nguyen, C.T.C.¹

4
- 0030230992
- (1996) J. Micromech. Microeng. , vol.6 , pp. 301
- Fang, W.¹ Wickert, J.A.²

5
- 0032296249
- (1998) IEEE Trans. Microwave Theory Tech. , vol.46 , pp. 2587
- Dec, A.¹ Suyama, K.²

6
- 0010215566
- in press
- J. Electron. Mater.
- Chinthakindi, K.¹ Bhusari, D.M.² Dusch, B.P.³ Kohl, P.A.⁴

7
- 0031162348
- (1997) IEEE Trans. Compon., Packag. Manuf. Technol., Part A , vol.20 , pp. 241
- Hodge, T.C.¹ Bidstrup-Allen, S.A.² Kohl, P.A.³

8
- 0342592214
- (1999) Sens. Actuators A , vol.78 , pp. 8
- Min, Y.¹ Kim, Y.²

9
- 0029699624
- (1996) IEEE 46th Electronic Components and Technology Conference Proceedings , pp. 1069
- Smith, D.L.¹ Alimonda, A.S.²

10
- 0004234072
- John Wiley & Sons, New York
- (2000) Modern Electroplating, 4th Ed.
- Schlesinger, M.¹ Paunovic, M.²

11
- 0026839854
- (1992) Microelectron. Eng. , vol.17 , pp. 223
- Chu, W.¹ Schattenburg, M.L.² Smith, H.I.³

12
- 0018440126
- (1979) J. Appl. Electrochem. , vol.9 , pp. 219
- Angerer, H.¹ Ibl, N.²

13
- 0015287035
- (1972) Trans. IMF , vol.50 , pp. 73
- Cleghorn, W.H.¹ Crossley, J.A.² Lodge, K.J.³ Gnanasekaran, K.S.A.⁴

14
- 3943070464
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 1
- Maboudian, R.¹ Howe, R.T.²

15
- 0033742679
- (2000) Sens. Actuators A , vol.82 , pp. 219
- Maboudian, R.¹ Ashurst, W.R.² Carraro, C.³

16
- 0342459190
- (1991) J. Am. Chem. Soc. , vol.113 , pp. 7152
- Laibinis, P.E.¹ Whitesides, G.M.² Allara, D.L.³ Tao, Y.⁴ Parikh, A.N.⁵ Nuzzo, R.G.⁶

17
- 0000073841
- (1909) Proc. R. Soc. London, Ser. A , vol.A82 , pp. 172
- Stoney, G.G.¹

18
- 0018541447
- (1979) J. Appl. Phys. , vol.50 , pp. 6887
- Lo, C.C.¹ Augis, J.A.² Pinnel, M.R.³

19
- 0010175515
- note

20
- 0343930709
- (1999) Sens. Actuators A , vol.78 , pp. 28
- Hoffmann, M.¹ Kopka, P.² Voges, E.³

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