The influence of anisotropy and non-locality of the electron distribution function as well as non-equilibrium ion diffusion on the electrodynamics of CF4 DC discharge at low pressure

Journal of Physics D: Applied Physics

Volumn 30, Issue 3, 1997, Pages 423-431

  Feoktistov, V A ^a   Ivanov, V V ^a   Popov, A M ^a   Rakhimov, A T ^a   Rakhimova, T V ^a   Slovetsky, D I ^b   Volynets, V N ^b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b TOPCHIEV INSTITUTE OF PETROCHEMICAL SYNTHESIS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CALCULATIONS; DIFFUSION; ELECTRIC FIELD EFFECTS; ELECTRODYNAMICS; ELECTRONS; GLOW DISCHARGES; IONIZATION; IONS; MONTE CARLO METHODS; PLASMAS; PRESSURE;

ELECTRON DISTRIBUTION FUNCTION; MEAN ELECTRON ENERGY METHOD; NON EQUILIBRIUM ION DIFFUSION; TETRAFLUOROMETHANE;

ORGANIC COMPOUNDS;

EID: 0031557069     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/3/015     Document Type: Article

References (27)

1. Christophorou L G, Datskos P J and Carter JG 1991 Nucl. Instrum. Methods A 309 160
2. Kono A, Haverlag M, Kroesen G M W and de Hoog F J 1991 J. Appl. Phys. 70 2939
3. Haverlag M, Kono A, Passchier D, Kroesen G M W, Goedheer W J and de Hoog F J 1991 J. Appl. Phys. 70 3472
4. Jamashita T, Kurashige H, Morii M M et al 1992 Nucl. Instrum. Methods A 317 213
5. Volynets V N, Lykyanova A V, Rakhimov A T, Slovetsky D I and Sutin N V 1993 J. Phys. D: Appl. Phys. 26 647
6. Gogolides E, Stathakopoulos M and Boudouvis A 1994 J. Phys. D: Appl. Phys. 27 1878
7. Franklin R N, Daniels P G and Snell J 1993 J. Phys. D: Appl. Phys. 26 1638
8. Franklin R N and Snell J 1994 J. Phys. D: Appl. Phys. 27 2102
9. Feoktistov V A, Lopaev D V, Klopovsky K S, Popov A M, Popovicheva A T, Rakhimov A T and Rakhimova T V 1993 J. Nucl. Mater. 200 309
10. Feoktistov V A, Popov A M, Popovicheva O B, Rakhimov A T, Rakhimova T V and Volkova E A 1991 IEEE Trans. Plasma Sci. 19 163
11. Lushner M J 1983 J. Appl. Phys. 54 4958
12. Boswell R W and Morey L J 1989 Appl. Phys. Lett. 52 21
13. Ivanov V V, Popov A M and Rakhimova T V 1995 Plasma Phys. Rep. 21 692
14. Ikuta N, Godota H and Yoko R 1994 J. Phys. Soc. Japan 63 536
15. Yokoyama R, Gotoda H, Yamamoto K and Ikuta N 1994 J. Phys. Soc. Japan 63 2594
16. Slovetsky D I and Deryugin A A 1987 Chemistry of Plasma vol 13 (Moscow: Energoatompress) p 240 (in Russian)
17. Masek K, Laska L and d'Agostino R 1989 Proc. ISPC-9 (Pugnochiuso) ed R d'Agostino (New York: IUPAC) p 191
18. Volynets V N, Deryugin A A, Slovetsky D I and Timokhov A G 1994 Sov. Chemical Phys. 13 96 (in Russian)
19. Volynets V N 1994 PhD Thesis Moscow State University (in Russian)
20. McDaniel E W and Mason E A 1973 The Mobility and Diffusion of Ions in Gases (New York: Wiley)
21. Smirnov B M 1974 Ions and Excited Atoms in Plasma (Moscow: Nauka) p 177 (in Russian)
22. Brouillard F and McGowan J W (ed) 1983 Physics of Ion-Ion and Electron-Ion Collisions (New York: Plenum)
23. Booth J P, Hancock G, Perry N D and Toogood MG 1989 Proc. ISPC-9 (Pugnochiuso) ed R d'Agostino (New York: IUPAC) p 458
24. Booth J P, Hancock G, Perry N D and Toogood MG 1989 J. Appl. Phys. 66 5251
25. Slovetsky D I 1980 Chemistry of Plasma vol 10 (Moscow: Energoatompress) p 108 (in Russian)
26. Bernstein J B and Holstein T 1954 Phys. Rev. A 94 1475
27. Tsendin L D 1974 Sov. J. Eksp. Teor. Fiz. 39 805