Thermal induced stress in dielectric membranes suitable for micromechanised gas sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 81-85

  Puigcorbe�, J ^a   Vila�, A ^a   Gra�cia, I ^a   Cane�, C ^a   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Dielectric membrane; FEM analysis; Gas sensor; Microheater; Thermomechanical

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DIELECTRIC MATERIALS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MEMBRANES; MICROELECTRONICS; RESIDUAL STRESSES; THERMAL EXPANSION; THERMAL STRESS; THIN FILM DEVICES;

DIELECTRIC MEMBRANES;

CHEMICAL SENSORS;

EID: 0034872810     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425339     Document Type: Article

References (10)

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8. Realization and performance of thin SiO2/SiNx membrane for microheater applications