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Solid-State Electronics

Volumn 46, Issue 4, 2002, Pages 555-558

Observation of dislocation etch pits in epitaxial lateral overgrowth GaN by wet etching

(4) Wen, T C a Lee, W I a Sheu, J K b Chi, G C b

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b NATIONAL CENTRAL UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COALESCENCE; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; GALLIUM NITRIDE; SCANNING ELECTRON MICROSCOPY; SURFACE TOPOGRAPHY;

EPITAXIAL LATERAL OVERGROWTH (ELO);

SEMICONDUCTING FILMS;

EID: 0036533115 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1101(01)00256-8 Document Type: Article

Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.