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Volumn 299-302, Issue PART 2, 2002, Pages 1316-1320

CMOS polycrystalline silicon circuits on steel substrates

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; ELECTRON MOBILITY; HOLE MOBILITY; POLYSILICON; STEEL; SUBSTRATES; THIN FILM TRANSISTORS;

EID: 0036531549     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01153-X     Document Type: Article
Times cited : (3)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.