|
Volumn 299-302, Issue PART 2, 2002, Pages 1316-1320
|
CMOS polycrystalline silicon circuits on steel substrates
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
CRYSTALLIZATION;
ELECTRON MOBILITY;
HOLE MOBILITY;
POLYSILICON;
STEEL;
SUBSTRATES;
THIN FILM TRANSISTORS;
POLYSILICON FILMS;
CMOS INTEGRATED CIRCUITS;
|
EID: 0036531549
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)01153-X Document Type: Article |
Times cited : (3)
|
References (20)
|