Polycrystalline thin-film transistors on plastic substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3636, Issue , 1999, Pages 4-10

  Carey, Paul G ^a   Smith, Patrick M ^a   Theiss, Steven D ^a   Wickboldt, Paul ^a   Sigmon, Thomas W ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DEPOSITION; ELECTRIC PROPERTIES; LOW TEMPERATURE OPERATIONS; PLASTICS; POLYCRYSTALLINE MATERIALS; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; THIN FILM TRANSISTORS;

FLEXIBLE DISPLAYS; LASER CRYSTALLIZATION; LASER DOPING; PLASTIC SUBSTRATES; POLYCRYSTALLINE THIN FILM TRANSISTORS; POLYSILICON;

FLAT PANEL DISPLAYS;

EID: 0033607992     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)