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Volumn 9, Issue 1, 2001, Pages 19-22
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Glass: A critical material in the development of electronic displays
a
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Author keywords
Excimer lasers; Hydrogenated a Si; PECVD films; Poly Si TFTs
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Indexed keywords
AMORPHOUS SILICON;
COMPOSITION;
DISPLAY DEVICES;
EXCIMER LASERS;
HYDROGENATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYSILICON;
SOLID STATE PHYSICS;
VACUUM APPLICATIONS;
ACTIVE COMPONENTS;
CRITICAL MATERIAL;
SOLID STATE DISPLAYS;
VACUUM BASED DISPLAYS;
GLASS;
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EID: 0034986297
PISSN: 10710922
EISSN: None
Source Type: Journal
DOI: 10.1889/1.1844654 Document Type: Conference Paper |
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Times cited : (4)
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References (5)
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