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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 2, 2002, Pages 548-553

Investigation of temperature coefficient of resistance and crystallization of semiconducting YBaCuO thin films using pulsed laser annealing

(4) Yildiz, A a Celik Butler Z a Butler, D P a Kim, Choong Un b

a Southern Methodist University (United States)

b UNIVERSITY OF TEXAS AT ARLINGTON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITANCE; CRYSTALLIZATION; DIELECTRIC PROPERTIES; ELECTRIC CONDUCTIVITY; OXYGEN; PULSED LASER APPLICATIONS; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; YTTRIUM BARIUM COPPER OXIDES;

PULSED LASER ANNEALING (PLA); TEMPERATURE COEFFICIENT;

THIN FILMS;

EID: 0036505586 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1451302 Document Type: Article

Times cited : (3)

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