SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4303-4309

A systematic study and optimization of parameters affecting grain size and surface roughness in excimer laser annealed polysilicon thin films

(3) Marmorstein, Aaron a Voutsas, Apostolos T b Solanki, Raj a

a OREGON HEALTH AND SCIENCE UNIVERSITY (United States)

b Sharp Microelectronics Technology Inc Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037575423 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.366238 Document Type: Article

Times cited : (66)

References (19)

1
- 0343135544
- M. J. Edwards, S. D. Brotherton, J. R. Ayres, and D. J. McCulloch, Proceedings of the International Device Research Conference 95, p. 335 (1995).
- (1995) Proceedings of the International Device Research Conference , vol.95 , pp. 335
- Edwards, M.J.¹ Brotherton, S.D.² Ayres, J.R.³ McCulloch, D.J.⁴

2
- 0002007872
- S. Inoue, M. Matsuo, K. Kitawada, and S. Takenaka, Proceedings of International Device Research Conference 95, p. 339 (1995).
- (1995) Proceedings of International Device Research Conference 95 , pp. 339
- Inoue, S.¹ Matsuo, M.² Kitawada, K.³ Takenaka, S.⁴

3
- 0000207607
- T. Voutsas and M. Halalis, J. Appl. Phys. 76, 777 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 777
- Voutsas, T.¹ Halalis, M.²

4
- 0001212787
- K.-Y. Choi and M.-K. Han, J. Appl. Phys. 80, 1883 (1996).
- (1996) J. Appl. Phys. , vol.80 , pp. 1883
- Choi, K.-Y.¹ Han, M.-K.²

5
- 0029246215
- A. Kohono, T. Sashima, N. Sano, M. Sediya, and M. Hara, IEEE Trans. Electron Devices 42, 251 (1995).
- (1995) IEEE Trans. Electron Devices , vol.42 , pp. 251
- Kohono, A.¹ Sashima, T.² Sano, N.³ Sediya, M.⁴ Hara, M.⁵

6
- 4143122374
- M. Cao, S. Talwar, K. J. Kramer, T. W. Sigmon, and K. C. Saraswat, IEEE Trans. Electron Devices 43, 56 (1996).
- (1996) IEEE Trans. Electron Devices , vol.43 , pp. 56
- Cao, M.¹ Talwar, S.² Kramer, K.J.³ Sigmon, T.W.⁴ Saraswat, K.C.⁵

7
- 0028514767
- P. Mei, J. B. Boyce, M. Hack, R. Lujan, S. E. Ready, D. K. Fork, R. I. Johnson, and G. B. Anderson, J. Appl. Phys. 76, 3194 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 3194
- Mei, P.¹ Boyce, J.B.² Hack, M.³ Lujan, R.⁴ Ready, S.E.⁵ Fork, D.K.⁶ Johnson, R.I.⁷ Anderson, G.B.⁸

8
- 0030574951
- D. K. Fork, G. B. Anderson, J. B. Boyce, R. I. Johnson, and P. Mei, Appl. Phys. Lett. 68, 2138 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2138
- Fork, D.K.¹ Anderson, G.B.² Boyce, J.B.³ Johnson, R.I.⁴ Mei, P.⁵

9
- 0003902782
- Chapman & Hall, New York
- W. C. O'Mara, Liquid Crystal Flat Panel Displays (Chapman & Hall, New York, 1993), p. 60.
- (1993) Liquid Crystal Flat Panel Displays , pp. 60
- O'Mara, W.C.¹

10
- 8744262971
- P. M. Smith, P. G. Carey, and T. W. Sigmon, Appl. Phys. Lett. 70, 342 (1996).
- (1996) Appl. Phys. Lett. , vol.70 , pp. 342
- Smith, P.M.¹ Carey, P.G.² Sigmon, T.W.³

11
- 36449004108
- J. S. Im, H. J. Kim, and M. O. Thompson, Appl. Phys. Lett. 63, 1969 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1969
- Im, J.S.¹ Kim, H.J.² Thompson, M.O.³

12
- 0027848456
- H. Kuriyama, T. Nohda, S. Ishida, T. Kuwahara, S. Noguchi, S. Kiyama, S. Tsuda, and S. Nakano, Jpn. J. Appl. Phys., Part 1 32, 6190 (1993).
- (1993) Jpn. J. Appl. Phys., Part 1 , vol.32 , pp. 6190
- Kuriyama, H.¹ Nohda, T.² Ishida, S.³ Kuwahara, T.⁴ Noguchi, S.⁵ Kiyama, S.⁶ Tsuda, S.⁷ Nakano, S.⁸

13
- 4143056037
- T. Voutsas, A. Marmorstein, and R. Solanki, Proc. SPIE 3014, 112 (1997).
- (1997) Proc. SPIE , vol.3014 , pp. 112
- Voutsas, T.¹ Marmorstein, A.² Solanki, R.³

14
- 0029291622
- D. J. McCulloch and S. D. Brotherton, Appl. Phys. Lett. 66, 2060 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2060
- McCulloch, D.J.¹ Brotherton, S.D.²

15
- 84956259688
- H. Kuriyama, S. Kiyama, S. Noguchi, T. Kuwahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, H. Kawata, M. Osumi, S. Tsuda, S. Nakano, and Y. Kuwano, Jpn. J. Appl. Phys., Part 1 30, 3700 (1991).
- (1991) Jpn. J. Appl. Phys., Part 1 , vol.30 , pp. 3700
- Kuriyama, H.¹ Kiyama, S.² Noguchi, S.³ Kuwahara, T.⁴ Ishida, S.⁵ Nohda, T.⁶ Sano, K.⁷ Iwata, H.⁸ Kawata, H.⁹ Osumi, M.¹⁰ Tsuda, S.¹¹ Nakano, S.¹² Kuwano, Y.¹³

16
- 0028529703
- H. Kuriyama, T. Nohda, Y. Aya, T. Kuwahara, K. Wakisaka, S. Kiyama, and S. Tsuda, Jpn. J. Appl. Phys., Part 1 33, 5657 (1994).
- (1994) Jpn. J. Appl. Phys., Part 1 , vol.33 , pp. 5657
- Kuriyama, H.¹ Nohda, T.² Aya, Y.³ Kuwahara, T.⁴ Wakisaka, K.⁵ Kiyama, S.⁶ Tsuda, S.⁷

17
- 0028587464
- G. B. Anderson, J. B. Boyce, D. K. Fork, R. I. Johnson, P. Mei, and S. E. Ready, Mater. Res. Soc. Symp. Proc. 343, 709 (1994).
- (1994) Mater. Res. Soc. Symp. Proc. , vol.343 , pp. 709
- Anderson, G.B.¹ Boyce, J.B.² Fork, D.K.³ Johnson, R.I.⁴ Mei, P.⁵ Ready, S.E.⁶

18
- 33744604184
- J. F. Young, J. S. Preson, H. M. van Driel, and J. E. Sipe, Phys. Rev. B 27, 1155 (1983).
- (1983) Phys. Rev. B , vol.27 , pp. 1155
- Young, J.F.¹ Preson, J.S.² Van Driel, H.M.³ Sipe, J.E.⁴

19
- 0028208086
- J. B. Boyce, G. B. Anderson, D. K. Fork, R. I. Johnson, P. Mei, and S. E. Ready, Mater. Res. Soc. Symp. Proc. 321, 671 (1994).
- (1994) Mater. Res. Soc. Symp. Proc. , vol.321 , pp. 671
- Boyce, J.B.¹ Anderson, G.B.² Fork, D.K.³ Johnson, R.I.⁴ Mei, P.⁵ Ready, S.E.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.