Laser doping of silicon carbide substrates

Journal of Electronic Materials

Volumn 31, Issue 3, 2002, Pages 200-208

  Salama, I A ^a   Quick, N R ^b   Kar, A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Lake Mary Ear Nose Throat and Allergy   (United States)

Author keywords

Direct write; Laser doping; Semiconductor; Silicon carbide; Wide bandgap

Indexed keywords

ELECTRIC RESISTANCE; ENERGY GAP; HIGH TEMPERATURE APPLICATIONS; INERT GASES; IRRADIATION; LASER BEAMS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; SUBSTRATES;

LASER CONVERSION TECHNIQUE; LASER DOPING;

SILICON CARBIDE;

EID: 0036502994     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0207-3     Document Type: Article

References (30)