Laser conversion of electrical properties for silicon carbide device applications

Journal of Laser Applications

Volumn 13, Issue 1, 2001, Pages 26-31

  Sengupta, D K ^a   Quick, N R ^b   Kar, A ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Applicote Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC INSULATION; EXCIMER LASERS; HIGH TEMPERATURE OPERATIONS; LASER BEAM EFFECTS; METALLIZING; NEODYMIUM LASERS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

LASER CONVERSION; LASER DIRECT WRITING;

SILICON CARBIDE;

EID: 0034817488     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.1340336     Document Type: Article

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