Compensation implants in 6H-SiC

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4223-4227

  Edwards, Andrew ^a   Dwight, Deborah N ^a   Rao, Mulpuri V ^a   Ridgway, M C ^b   Keiner, G ^c   Papanicolaou, N ^c  

^a George Mason University   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000039557     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366226     Document Type: Article

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