Spatio-temporal evolution of a pulsed chlorine discharge

Plasma Sources Science and Technology

Volumn 9, Issue 3, 2000, Pages 256-269

  Midha, Vikas ^a,b   Economou, Demetre J ^a  

^a University of Houston   (United States)

^b GE GLOBAL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; ELECTRIC DISCHARGES; FREQUENCIES; PLASMA DENSITY; PLASMA SIMULATION; PRESSURE EFFECTS;

DISCHARGE REACTORS; ELECTRON TEMPERATURE;

PLASMA SOURCES;

EID: 0034251430     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/3/303     Document Type: Article

References (32)

1. Samukawa S and Mieno T 1996 Plasma Sources Sci. Technol. 5 132
2. Ahn T H, Nakurama K and Sugai H 1996 Plasma Sources Sci. Technol. 5 139
3. Shibayama T, Shindo H and Horiike Y 1996 Plasma Sources Sci. Technol. 5 254
4. Kinoshita T, Hane M and McVittie J 1996 J. Vac. Sci. Technol. B 14 560
5. Hwang G S and Giapis K P 1997 J. Vac. Sci. Technol. B 15 70
6. Arnold J C and Sawin H H 1991 J. Appl. Phys. 70 5314
7. Sugai H, Nakamura K, Hikisaka Y and Nakamura M 1995 J. Vac. Sci. Technol. A 13 887
8. Boswell R and Porteous R 1987 J. Appl. Phys. 62 3123
9. Verdeyen J, Bederman J and Overzet L 1990 J. Vac. Sci. Technol. A 8 1851
10. Jiang P, Economou D J and Shin C B 1995 Plasma Chem. Plasma Process. 15 383
11. Park S-K and Economou D J 1991 J. Electrochem. Soc. 138 1499
12. Meyyappan M 1996 J. Vac. Sci. Technol. A 14 2122
13. Ashida S and Lieberman M A 1997 Japan. J. Appl. Phys. 36 854-61
14. Lymberopoulos D P, Kolobov V I and Economou D J 1998 J. Vac. Sci. Technol. A 16 564
15. Overzet L J, Lin Y and Luo L 1992 J. Appl. Phys. 72 5579
16. Lymberopoulos D P and Economou D J 1995 J. Res. Natl Inst. Stand. Technol. 100 473
17. Kouznetsov I, Litchenberg A J and Lieberman M A 1999 J. Appl. Phys. 86 4142
18. Kolobov V I and Economou D J 1998 Appl. Phys. Lett. 72 656
19. Rogoff G L 1985 J. Phys. D: Appl. Phys. 18 1533
20. Kaganovich I D, Economou D J, Ramamurthi B N and Midha V 2000 Phys. Rev. Lett. 84 1918
21. Kaganovich I D and Economou D J 2000 Phys. Rev. E at press
22. Midha V and Economou D J 1998 45th Int. Symp., American Vacuum Soc. (Baltimore, MD, November 2-6 1998)
23. Hindmarsh A C 1983 Scientific Computing ed R S Stepleman (IMACS) (Amsterdam: North-Holland) p 55
24. Lymberopoulos D P and Economou D J 1997 IEEE Trans. Plasma Sci. 23 573
25. Hebner G A and Fleddermann C B 1997 J. Appl. Phys. 82 2814-21
26. Malyshev M V, Donnelly V M, Colonell J I and Samukawa S 1998 45th Int. Symp., American Vacuum Soc. (Baltimore, MD, November 2-6, 1998)
27. Malyshev M V 1999 PhD Dissertation Princeton University
28. Kaganovich I D and Tsendin L D 1993 Plasma Phys. Rep. 19 645
29. Tsendin L D 1989 Sov. Phys.-Tech. Phys. 34 11
30. Litchenberg A J, Vahedi V, Lieberman M A and Rognlien T 1994 J. Appl. Phys. 75 2339
31. Christophorou L G and Olthoff J K 1999 J. Phys. Chem. Ref. Data 28 131
32. Smith D, Dean A G and Adams N G 1974 J. Phys. D: Appl. Phys. 7 1944