SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 2 A, 2002, Pages 778-783

Film precursor formation in metalorganic chemical vapor deposition of barium strontium titanate films: A study by microdischarge optical emission spectroscopy

(3) Momose, Shun a Nakamura, Toshihiro a Tachibana, Kunihide a

a KYOTO UNIVERSITY (Japan)

Author keywords

(Ba, Sr)TiO3; DRAM; Liquid source MOCVD; Microdischarge optical emission spectroscopy; Oxida tion gas; Precursor; Sr(DPM)2; Ti(t BuO)2(DPM)2

Indexed keywords

ABSORPTION SPECTROSCOPY; BARIUM COMPOUNDS; DYNAMIC RANDOM ACCESS STORAGE; EMISSION SPECTROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDATION; SPECTROSCOPIC ANALYSIS;

OPTICAL EMISSION SPECTROSCOPY;

THIN FILMS;

EID: 0036478674 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.778 Document Type: Article

Times cited : (11)

References (18)

1
- 0035328769
- and references therein
- (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 3435
- Yamamuka, M.¹ Kawahara, T.² Tarutani, M.³ Horikawa, T.⁴ Shibano, T.⁵ Oomori, T.⁶

2
- 0000781822
- and references therein
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 2200
- Sone, S.¹ Akahane, R.² Arita, K.³ Yabuta, H.⁴ Yamamichi, S.⁵ Yoshida, M.⁶ Kato, Y.⁷

3
- 0031152660
- (1997) Thin Solid Films , vol.301 , pp. 154
- Lee, J.S.¹ Song, H.W.² Jun, B.-H.³ Kwack, D.H.⁴ Yu, B.G.⁵ Jiang, Z.-T.⁶ No, K.⁷

4
- 0031274337
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 6946
- Kang, C.S.¹ Cho, H.-J.² Hwang, C.S.³ Lee, B.T.⁴ Lee, K.-H.⁵ Horii, H.⁶ Kim, W.D.⁷ Lee, S.I.⁸ Lee, M.Y.⁹

5
- 0000638237
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 2205
- Kawahara, T.¹ Matsuno, S.² Yamamuka, M.³ Tarutani, M.⁴ Sato, T.⁵ Horikawa, T.⁶ Uchikawa, F.⁷ Ono, K.⁸

6
- 0001309927
- (1999) J. Appl. Phys. , vol.86 , pp. 1082
- Yamamuka, M.¹ Kawahara, T.² Tarutani, M.³ Horikawa, T.⁴ Oomori, T.⁵ Ono, K.⁶

7
- 0000628076
- (2000) J. Appl. Phys. , vol.87 , pp. 7430
- Gao, Y.¹ Perkins, C.L.² He, S.³ Alluri, P.⁴ Tran, T.⁵ Thevuthasan, S.⁶ Henderson, M.A.⁷

8
- 0033097419
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1117
- Ryu, H.-K.¹ Heo, J.S.² Cho, S.-I.³ Moon, S.H.⁴

9
- 0035455035
- (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 5501
- Momose, S.¹ Sahara, R.² Nakamura, T.³ Tachibana, K.⁴

10
- 0033872211
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 555
- Momose, S.¹ Nakamura, T.² Tachibana, K.³

11
- 0034262431
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 5384
- Momose, S.¹ Nakamura, T.² Tachibana, K.³

12
- 0025448087
- (1990) Jpn. J. Appl. Phys. , vol.29
- Matsuno, S.¹ Uchikawa, F.² Yoshizaki, K.³

13
- 0034189909
- (2000) Inorg. Chem. , vol.39 , pp. 2011
- Paw, W.¹ Baum, T.H.² Lam, K.-C.³ Rheingold, A.L.⁴

14
- 33947295546
- (1970) Anal. Chem. , vol.42 , pp. 1828
- Schwarberg, J.E.¹ Sievers, R.E.² Moshier, R.W.³

15
- 0027668451
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 4126
- Horikawa, T.¹ Mikami, N.² Makita, T.³ Tanimura, J.⁴ Kataoka, M.⁵ Sato, K.⁶ Nunoshita, M.⁷

16
- 0030120695
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 2530
- Yamamuka, M.¹ Kawahara, T.² Yuuki, A.³ Ono, K.⁴

17
- 0030315576
- (1996) Integrat. Ferroelectr. , vol.12 , pp. 199
- Hwang, C.S.¹ Kang, C.S.² Cho, H.-J.³ Park, S.O.⁴ Lee, B.T.⁵ Kim, J.W.⁶ Horii, H.⁷ Lee, S.I.⁸ Lee, M.Y.⁹

18
- 0036153064
- (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 6619
- Nakamura, T.¹ Momose, S.² Tachibana, K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.