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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 2 A, 2000, Pages 555-559

Microdischarge optical emission spectroscopy as a novel diagnostic tool for metalorganic chemical vapor deposition of (Ba,Sr)TiO3 films

(3) Momose, Shun a Nakamura, Toshihiro a Tachibana, Kunihide a

a KYOTO UNIVERSITY (Japan)

Author keywords

(Ba,Sr)TiO3; DRAM; Liquid source MOCVD; Microdischarge optical emission spectroscopy; Oxidation; Rotational temperature; Thermal decomposition

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; EMISSION SPECTROSCOPY; FILM GROWTH; HIGH TEMPERATURE EFFECTS; LIGHT EMISSION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDATION; PYROLYSIS;

MICRODISCHARGE OPTICAL EMISSION SPECTROSCOPY;

BARIUM TITANATE;

EID: 0033872211 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.555 Document Type: Article

Times cited : (20)

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