Effects of gas-phase thermal decompositions of chemical vapor deposition source molecules on the deposition of (Ba, Sr)TiO3 films: a study by in situ Fourier transform infrared spectroscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 9 B, 2000, Pages 5384-5388

  Momose, Shun ^a   Nakamura, Toshihiro ^a   Tachibana, Kunihide ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CHEMICAL BONDS; FERROELECTRIC MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PYROLYSIS; STRONTIUM COMPOUNDS; THERMODYNAMIC STABILITY;

INFRARED ABSORBANCE; STRONTIUM TITANATE;

THIN FILMS;

EID: 0034262431     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.5384     Document Type: Article

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