Self-interstitials and substitutional C in silicon: Interstitial-trapping and C-clustering

Materials Research Society Symposium - Proceedings

Volumn 717, Issue , 2002, Pages 219-224

  Mirabella, S ^a   Scalese, S ^a   Terrasi, A ^a   Priolo, F ^a   Coati, A ^b   De Salvador, D ^b   Napolitani, E ^b   Berti, M ^b  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPUTER SIMULATION; FILTRATION; ION IMPLANTATION; PRECIPITATION (CHEMICAL);

INTERSTITIAL-TRAPPING;

SEMICONDUCTING SILICON;

EID: 0036447852     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-717-c5.5     Document Type: Conference Paper

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