Grating groove metrology and efficiency predictions from the soft x-ray to the fair infrared

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4485, Issue , 2002, Pages 405-416

  Content, D ^a   Arsenovic, P ^a   Kuznetsov, I ^a   Hadjimichael, T ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

Atomic force microscope; Diffraction gratings; Microinterferometer; Stylus profilometer

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFEROMETERS; INTERFEROMETRY; LITHOGRAPHY; PROFILOMETRY; SURFACE ROUGHNESS;

GRATING GROOVE METROLOGY; HOLOGRAPHIC GRATINGS; SURFACE METROLOGY; SURFACE RELIEF GRATING;

DIFFRACTION GRATINGS;

EID: 0036397883     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.454276     Document Type: Conference Paper

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