Thin-film interference effects on the efficiency of a normal-incidence grating in the 100–350-Å wavelength region

Applied Optics

Volumn 38, Issue 7, 1999, Pages 1251-1258

  Seely, John F ^a   Goray, Leonid I ^b   Hunter, William R ^c   Rife, Jack C ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b Intl Intellectual Group Inc   (United States)

^c SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001534191     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.001251     Document Type: Article

References (12)

1. J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter, “Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Ä wavelength region,” Appl. Opt. 36, 8206-8213 (1997).
2. M. Neviere, “Multilayer-coated gratings for x-ray diffraction: differential theory,” J. Opt. Soc. Am. A 8, 1468-1473 (1991).
3. M. Neviere, “Bragg-Fresnel multilayer gratings: electromagnetic theory,” J. Opt. Soc. Am. A 11, 1835-1845 (1994).
4. L. I. Goray, “Numerical analysis for relief gratings working in the soft x-ray and XUV region by the integral equation method,” in X-Ray and UVDetectors, R. B. Hoover and M. W. Tate, eds., Proc. SPIE 2278, 168-172 (1994).
5. L. I. Goray and B. C. Chernov, “Comparison of rigorous methods for x-ray and XUV grating diffraction analysis,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. C. Walker, eds., Proc. SPIE 2515, 240-245 (1995).
6. M. P. Kowalski, J. F. Seely, L. I. Goray, W. R. Hunter, and J. C. Rife, “Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125-225-Ä wavelength range,” Appl. Opt. 36, 8939-8943 (1997).
7. J. C. Rife, H. R. Sadeghi, and W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064-2067 (1989).
8. W. R. Hunter and J. C. Rife, “An ultrahigh vacuum reflecto-meter/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465-468 (1986).
9. B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181-342 (1993).
10. Updated optical constants were obtained from the internet site cindy.lbl.gov/optical_constants.
11. D. Maystre, “A new general integral theory for dielectric coated gratings,” J. Opt. Soc. Am. 68, 490-495 (1978).
12. J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, Jr., G. E. Holland, C. N. Boyer, and C. M. Brown, “On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136-142-Ä wavelength region and near normal incidence,” Appl. Opt. 32, 4890-4897 (1993).