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Volumn 4291, Issue , 2001, Pages 1-12

Modified integral method for weak convergence problems of light scattering on relief grating

Author keywords

Diffraction grating; Diffraction theory; Efficiency modeling; Electromagnetic theory; Integral method; PCGrate software; Reflection gratings; Relief gratings; Theory of grating; Transmission gratings

Indexed keywords

DIFFRACTION GRATINGS; GREEN'S FUNCTION; INTEGRAL EQUATIONS; INTEGRATION; LIGHT POLARIZATION; NUMERICAL ANALYSIS; X RAY DIFFRACTION ANALYSIS;

EID: 0034934020     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.424838     Document Type: Conference Paper
Times cited : (21)

References (28)
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    • Goray, L.I.1
  • 7
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    • (1994) SPIE Proc. , vol.2278 , pp. 168-172
    • Goray, L.I.1
  • 8
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  • 17
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    • Normal incidence multilayer gratings for the extreme ultraviolet region: Experimental measurements and computational modeling
    • (1999) SPIE Proc. , vol.3766 , pp. 364-370
    • Seely, J.F.1    Goray, L.I.2
  • 18
    • 0032596741 scopus 로고    scopus 로고
    • Diffraction grating groove analysis used to predict efficiency and scatter performance
    • (1999) SPIE Proc. , vol.3778 , pp. 19-30
    • Content, D.1
  • 21
    • 0027711384 scopus 로고
    • Multilayer modal method for diffraction gratings of arbitrary profile, depth, and permitivity
    • (1993) J. Opt. Soc. Am. A , vol.10 , pp. 2581-2591
    • Li, L.1
  • 25
    • 0004545483 scopus 로고    scopus 로고
    • private communications
    • (2000)
    • Li, L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.