Applications of intelligent control in improving dynamics of precision motion systems used in microelectronics manufacturing

Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 2002, Pages 410-414

  He, Tian ^a  

^a Kulicke and Soffa   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; INTELLIGENT CONTROL; MICROELECTRONICS; MOTION CONTROL; RAPID PROTOTYPING;

MICROELECTRONICS MANUFACTURING; PRECISION MOTION SYSTEMS;

ELECTRONIC EQUIPMENT MANUFACTURE;

EID: 0036397156     PISSN: 10898190     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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