A method for personal expertise-independent evaluation of image resolution in scanning electron microscopy

Scanning

Volumn 24, Issue 4, 2002, Pages 191-203

  Ishitani, Tohru ^a   Sato, Mitsugu ^a  

^a HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Image resolution; Microscopy; Scanning electron microscope

Indexed keywords

FOURIER TRANSFORMS; HARMONIC ANALYSIS; OPTICAL RESOLVING POWER;

IMAGE RESOLUTION;

SCANNING ELECTRON MICROSCOPY;

ANALYTIC METHOD; ARTICLE; CONTRAST ENHANCEMENT; EVALUATION; FOURIER TRANSFORMATION; IMAGE RECONSTRUCTION; PARTICLE SIZE; PRIORITY JOURNAL; RELIABILITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SIGNAL NOISE RATIO; SIGNAL PROCESSING;

EID: 0036327001     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950240406     Document Type: Article

References (21)

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3. Fast noise variance estimation
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6. Automatic focusing and astigmatism correction method based on Fourier transform of scanning electron microscope images
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8. A robust focusing and astigmatism correction method for the scanning electron microscope - Part II
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10. Potentials of on-line scanning electron microscope performance analysis using NIST reference material 8091
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13. An automatic focusing and stigmating system for the SEM
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15. A digital computer method for revealing directional information in images
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17. Image sharpness measurement in scanning electron microscopy - Part II
18. Reference material 8091: New scanning electron microscope sharpness standard
19. Image sharpness measurement in scanning electron microscope - Part III