Potentials of on-line scanning electron microscope performance analysis using NIST Reference Material 8091

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 28-37

  Postek, Michael T ^a   Vladar, Andras E ^a   Zhang, Nien Fan ^a   Larrabee, Robert D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; INSTRUMENT TESTING; PERFORMANCE; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TUNGSTEN;

KURTOSIS; ONLINE INSTRUMENT TESTING;

ELECTRON BEAM LITHOGRAPHY;

EID: 0033705462     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)