SCOPUS 정보 검색 플랫폼

Scanning

Volumn 19, Issue 8, 1997, Pages 553-563

A robust focusing and astigmatism correction method for the scanning electron microscope

(3) Ong, K H a Phang, J C H a Thong, J T L a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

Astigmatism correction; Automation; Focusing; Fourier transforms; Scanning electron microscopy

Indexed keywords

ALGORITHMS; AUTOMATION; FAST FOURIER TRANSFORMS; FOCUSING; MEDICAL PROBLEMS; REAL TIME SYSTEMS; VISION;

ASTIGMATISM CORRECTION; AUTOMATIC FOCUSING;

SCANNING ELECTRON MICROSCOPY;

ALGORITHM; ARTICLE; ASTIGMATISM; AUTOMATION; FOURIER TRANSFORMATION; IMAGE ENHANCEMENT; INTEGRATED CIRCUIT; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0031277404 PISSN: 01610457 EISSN: None Source Type: Journal
DOI: 10.1002/sca.4950190805 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.