Image sharpness measurement in the scanning electron microscope - Part III

Scanning

Volumn 21, Issue 4, 1999, Pages 246-252

  Zhang, Nien Fan ^a   Postek, Michael T ^a   Larrabee, Robert D ^a   Vladár, András E ^a   Keery, William J ^a   Jones, Samuel N ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Fourier transform; Image analysis; Kurtosis; Metrology; Scanning electron microscope

Indexed keywords

FOURIER TRANSFORMS; IMAGE ANALYSIS; IMAGE QUALITY; IMAGING TECHNIQUES; PROBABILITY DISTRIBUTIONS; STATISTICAL TESTS;

IMAGE SHARPNESS;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; FOURIER ANALYSIS; IMAGE ANALYSIS; IMAGE PROCESSING; IMAGE QUALITY; MATHEMATICAL ANALYSIS; MEASUREMENT; PRIORITY JOURNAL; QUALITY CONTROL; SCANNING ELECTRON MICROSCOPY;

EID: 0344069696     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950210404     Document Type: Article

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