Automatic focusing and astigmatism correction method based on fourier transform of scanning electron microscope images

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 2 A, 1999, Pages 957-960

  Ogasawara, Munehiro ^a   Fukudome, Yuji ^a   Hattori, Kiyoshi ^a   Tamamushi, Shuichi ^a   Koikari, Soshi ^a   Onoguchi, Kazunori ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Astigmatism; Autofocus; Electron beam lithography; Fourier transform; Scanning electron microscope; SEM

Indexed keywords

EID: 0000317276     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.957     Document Type: Article

References (3)

1. T. Ishizu, M. Sato and N. Kaneko: Oyo Sugaku Enshu 2 (Baifukan, Tokyo, 1969) [ in Japanese].
2. K. Hattori, H. Sunaoshi, and A. Ando: Proc. SPIE 3331 (1998) 503.
3. K. Hattori, R. Yoshikawa, H. Wada, H. Kusakabe, T. Yamaguchi, S. Magoshi, A. Miyagaki, S. Yamasaki, T. Takigawa, M. Kanoh, S. Nishimura, H. Housai and S. Hashimoto: J. Vac. Sci. Technol. B 11 (1993) 234.