A robust focusing and astigmatism correction method for the scanning electron microscope - Part II: Autocorrelation-based coarse focusing method

Scanning

Volumn 20, Issue 4, 1998, Pages 324-334

  Ong, K H ^a   Phang, J C H ^a   Thong, J T L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Autocorrelation; Automation; Focusing; Fourier transform; Scanning electron microscopy

Indexed keywords

ALGORITHM; ARTICLE; AUTOMATION; FOURIER TRANSFORMATION; IMAGE QUALITY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0031876507     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200406     Document Type: Article

References (11)

1. Burge RE, Browne MT, Dainty JC, Derome M, Lackovic S: High resolution with STEM. Proc 6th Eur Congr Electron Microscopy, Jerusalem, Vol. 1, 442-444 (1976)
2. Dodson TA, Joy DC: Fast Fourier transform techniques for measuring SEM resolution. Proc XIIth Int. Congr for EM. San Francisco Press (1990) 406-407
3. Dost MH: Automatic focus control of charged particle beams. IBM J Res Develop 171, (1968)
4. Frank J: The Role of Correlation Techniques in Computer Image Processing. Springer Verlag, Berlin, Heidelberg, New York (1980) 195-220
5. Gonzalez RC, Woods RE: Digital Image Processing. Addison Wesley Publishing Co., New York (1993) 81-128
6. Hersener J, Ricker T: Eine automatische Fokussierungseinrichtung für Rasterelektronmikroskope. Beitr Elecktronenmikroskop Direktabb Oberfl 5, 377 (1972)
7. Martin H, Perret P, Desplat C, Reisse P: New approach in scanning electron microscope resolution evaluation. SPIE Proc 2439, 310-317 (1995)
8. Ong KH, Phang JCH, Thong JTL: A robust focusing and astigmatism correction method for the scanning electron microscope. Scanning 19, 553-563 (1997)
9. Ong KH, Phang JCH, Thong JTL: A robust focusing and astigmatism correction method for the scanning electron microscope - Part III: An improved technique. Scanning (accepted)
10. Postek MT, Vladar AE: SEM performance evaluation using the sharpness criterion. SPIE Proc 2725, 504-514 (1996)
11. Tee WJ, Smith KCA, Holburn DM: An automatic focusing and stigmating system for the SEM. J Phys E: Sci Instrum 12, 35-38 (1979)