메뉴 건너뛰기
Ultramicroscopy
Volumn 88, Issue 3, 2001, Pages 151-170
Beam characteristics for various sizes of annular aperture on scanning electron microscope
Author keywords

Annular aperture; Depth of the focus; Resolution; Scanning electron microscope
Indexed keywords

ELECTRON OPTICS; FOCUSING; IMAGE QUALITY; OPTICAL TRANSFER FUNCTION; SCANNING ELECTRON MICROSCOPY;
EID: 0034989261     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(01)00084-5     Document Type: Article
Times cited : (7)
References (9)
  • 1
    • 0004825974 scopus 로고    scopus 로고
    • M. Born, E. Wolf, Principles of Optic, 7th Edition, Cambridge University Press, Cambridge, 1999, p. 461.
  • 2
    • 0004857903 scopus 로고    scopus 로고
    • H. Kubota, Wave Optics, Iwanami Shoten, Tokyo, 1971, p. 278. (in Japanese).
  • 3
    • 0004826443 scopus 로고
    • Aberration Theory Made Simple, Washington: SPIE Optical Engineering Press, (Chapter 9)
    • (1991)
    • Mahajan, V.N.1
  • 6
    • 0004858446 scopus 로고    scopus 로고
    • Resolution
    • Orloff J. (Ed.), CRC Press, New York: Handbook of Charged Particle Optics, (Chapter 8)
    • (1997)
    • Sato, M.1
  • 8
    • 0004858447 scopus 로고    scopus 로고
    • P. W. Hawkes, E. Kasper, Principles of Electron Optics, Vol. 1, Academic Press, London, 1996, p. 350.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.