Reference Material 8091: New scanning electron microscope sharpness standard

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue , 2001, Pages 827-834

  Vladar A E ^a   Postek, M T ^a   Zhang, N F ^a   Larrabee, R D ^a   Jones, S N ^a   Hajdaj, R E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

CD; CD SEM; Measurement; Metrology; Performance; Reference material; Scanning electron microscope; SEM; Standard

Indexed keywords

FOURIER TRANSFORMS; IMAGE QUALITY; INTEGRATED CIRCUIT MANUFACTURE; MEASUREMENT THEORY; MICROPROCESSOR CHIPS; STANDARDS;

CRITICAL DIMENSION (CD) METROLOGY;

ELECTRON MICROSCOPES;

EID: 0034769048     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436723     Document Type: Conference Paper

References (11)

1. Survey of scanning electron microscopes using quantitative resolution evaluation
2. SMART - Routines to measure SEM resolution and performance
3. SEM sharpness evaluation using the sharpness criterion
4. Image sharpness measurement in scanning electron microscopy. Part 1
5. Potentials of on-line scanning electron microscope performance analysis using NIST research material 2091
6. Image sharpness measurement in scanning electron microscopy. Part 2
7. Statistical measure for the sharpness of the SEM image
8. Image sharpness measurement in scanning electron microscopy. Part 3. Kurtosis
9. Multivariate kurtosis for measuring image sharpness