Metrics of resolution and performance for CD-SEMs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 108-114

  Joy, David C ^a   Ko, Yeong Uk ^a   Hwu, Justin J ^a  

^a UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORMS; IMAGE ANALYSIS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO;

CRITICAL DIMENSION SCANNING ELECTRON MICROSCOPES (CDSEM);

ELECTRON BEAM LITHOGRAPHY;

EID: 0033705459     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)