Bulk-etched surface micromachined and flip-chip integrated micromirror array for infrared applications

2000 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2000, Pages 71-72

  Tuantranont, A ^a   Liew, L A ^a   Bright, V M ^a   Zhang, Jianglong ^a   Zhang, Wenge ^a   Lee, Y C ^a  

^a University of Colorado   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002913703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2000.879631     Document Type: Conference Paper

References (4)

1. A. Tuantranont, V. M. Bright, W. Zhang, and Y. C. Lee, "Flip chip integration of lenslet arrays on segmented deformable micromirrors," SPIE DTM'99, Vol.3680, pp.668-678, 1999.
2. D. A. Koester, R. Mahadevan, A. Shishkoff, and K. W. Markus, "Multi-User MEMS Processes (MUMPs): Design handbook, Rev. 4," Cronos Integrated Microsystems, 3021 Cornwallis Road, Research Triangle Park, NC 27709, 1999.
3. W. Zhang, K. F. Harsh, M. A. Michalicek, V. M. Bright, and Y. C. Lee, "Flip-chip assembly for RF and optical MEMS," Proc. ASME InterPack'99, Vol. EEP-26-1, pp. 349-354, 1999.
4. A. Tuantranont, V. M. Bright, L. A. Liew, W. Zhang, and Y. C. Lee, "Smart phase-only micromirror array fabricated by standard CMOS process," IEEE MEMS'2000 Proceeding, pp. 455-460, 2000.