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Volumn 3680, Issue II, 1999, Pages 668-678
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Flip chip integration of lenslet arrays on segmented deformable micromirrors
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ARRAYS;
ELECTRONICS PACKAGING;
FLIP CHIP DEVICES;
MICROMACHINING;
MIRRORS;
LENSLET ARRAYS;
MICROLENSES;
MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS);
SEGMENTED DEFORMABLE MICROMIRRORS;
INTEGRATED OPTOELECTRONICS;
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EID: 0032634081
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.341259 Document Type: Conference Paper |
Times cited : (7)
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References (8)
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