Self-aligned assembly of microlens arrays with micromirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 90-100

  Tuantranont, Adisorn ^a   Bright, Victor M ^a   Zhang, Wenge ^a   Zhang, Jianglong ^a   Lee, Y C ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS PACKAGING; ELECTROSTATIC DEVICES; FLIP CHIP DEVICES; LASER BEAM EFFECTS; MICROMACHINING; MIRRORS; OPTICAL INSTRUMENT LENSES; POLYMERIC GLASS; SCANNING;

ELECTRONICS RESINS; LENSLET; MICROELECTROMECHANICAL DEFORMABLE MICROMIRRORS; MICROLENS ARRAYS; MICROMIRRORS; SURFACE MICROMACHINING PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033316180     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)