Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 344-349

  Schröpfer, Gerold ^a   Elflein, Wilhelm ^b   De Labachelerie, Michel ^a   Porte, Henri ^b   Ballandras, Sylvain ^a  

^a Lab Phys Metrologie Oscillateurs   (France)

^b FEMTO ST INSTITUTE   (France)

Author keywords

Accelerometers; Optical fiber sensors; Silicon micromachining

Indexed keywords

ACCELERATION; ETCHING; OPTICAL FIBERS; OPTICAL LINKS; SEMICONDUCTING SILICON; SUBSTRATES;

COHERENCE MODULATION; LATERAL OPTICAL ACCELEROMETER; REMOTE READOUT;

ACCELEROMETERS;

EID: 0042638117     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00065-X     Document Type: Article

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