Design, fabrication, and testing of micro-optical components for sensors and microsystems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3099, Issue , 1997, Pages 196-211

  Voelkel, Reinhard ^a   Nussbaum, Philippe ^a   Roulet, J Ch ^a   Blattner, Peter ^a   Weible, K J ^a   Herzig, Hans P ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; DESIGN; FABRICATION; LIQUID CRYSTAL DISPLAYS; NEURAL NETWORKS; OPTICAL SENSORS; PHOTOLITHOGRAPHY; PROJECTION SYSTEMS; TESTING;

OPTICAL MICROSYSTEMS; PHOTOSPECTROMETERS;

OPTICAL SYSTEMS;

EID: 0031315486     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)