Characterisation and modelling of planar on-chip integrated Peltier elements for highly localised thermal stabilisation and cooling

Annual IEEE Semiconductor Thermal Measurement and Management Symposium

Volumn , Issue , 2002, Pages 105-112

  Wijngaards, D D L ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Integrated Peltier cooler; Material characterisation; Modelling; On chip integration; PolySiGe

Indexed keywords

COMPUTER SIMULATION; COOLING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROPROCESSOR CHIPS; POLYSILICON; SEMICONDUCTING GERMANIUM; THERMODYNAMIC STABILITY; THIN FILMS;

ON-CHIP INTEGRATED PELTIER ELEMENTS; THERMAL STABILIZATION;

PELTIER EFFECT;

EID: 0036213142     PISSN: 10652221     EISSN: None     Source Type: Journal    
DOI: 10.1109/STHERM.2002.991354     Document Type: Article

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